Deep Etching of Silicon Based on Metal-Assisted Chemical Etching
Author:
Funder
National Research Foundation of Korea
Publisher
American Chemical Society (ACS)
Subject
General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acsomega.2c01113
Reference17 articles.
1. Controlled Microfabrication of High-Aspect-Ratio Structures in Silicon at the Highest Etching Rates: The Role of H2O2in the Anodic Dissolution of Silicon in Acidic Electrolytes
2. Metal-Assisted Chemical Etching of Silicon: A Review
3. Metal-assisted chemical etching of silicon and nanotechnology applications
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