Chemically Stable Atomic-Layer-Deposited Al2O3 Films for Processability
Author:
Affiliation:
1. Department of Electrical Engineering and Automation, Aalto University, P.O. Box 13500, Aalto, FIN-00076 Espoo, Finland
2. Okmetic Oy, Piitie 2, 01510 Vantaa, Finland
Funder
Electronic Components and Systems for European Leadership
Publisher
American Chemical Society (ACS)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.acs.org/doi/pdf/10.1021/acsomega.7b00443
Reference38 articles.
1. Chemical Stability of Titania and Alumina Thin Films Formed by Atomic Layer Deposition
2. Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200 °C
3. Permeability and corrosion in ZrO2/Al2O3 nanolaminate and Al2O3 thin films grown by atomic layer deposition on polymers
4. Al2O3 and TiO2 Atomic Layer Deposition on Copper for Water Corrosion Resistance
5. Biocompatibility of atomic layer-deposited alumina thin films
Cited by 57 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. First-Principles computation-driven mechanism study of tungsten growth on alumina surfaces with TiN nano-islands;Applied Surface Science;2024-11
2. Preparation of Al2O3 thin films by RS-ALD and edge passivation application for TOPCon half solar cells;Applied Surface Science;2024-11
3. Quantitative piezoelectric measurements of partially released Pb(Zr, Ti)O3 structures;Journal of Applied Physics;2024-09-03
4. Study of Mid-Pressure Ar Radiofrequency Plasma Used in Plasma-Enhanced Atomic Layer Deposition of α-Al2O3;Processes;2024-03-20
5. Post-annealing effect of low temperature atomic layer deposited Al2O3 on the top gate IGZO TFT;Nanotechnology;2024-01-25
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3