Characterization of Shock-Sensitive Deposits from the Hydrolysis of Hexachlorodisilane-Reference-Cited by-同舟云学术

Characterization of Shock-Sensitive Deposits from the Hydrolysis of Hexachlorodisilane

Published:2019-01-16 Issue:1 Volume:4 Page:1416-1424
ISSN:2470-1343
Container-title:ACS Omega
language:en
Short-container-title:ACS Omega

Author:

Lin Yu-Jhen¹,Liu Chien-Ho¹,Chin Mo-Geng¹,Wang Cheng-Chieh¹,Wang Sheng-Hsun¹,Tsai Hsiao-Yun¹,Chen Jenq-Renn¹^ORCID,Ngai Eugene Y.²,Ramachandran Ram³

Affiliation:

1. Department of Safety, Health and Environmental Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, 824, Taiwan

2. Chemically Speaking LLC, Whitehouse Station, New Jersey 08889, United States

3. Air Liquide Advanced Materials, Branchburg, New Jersey 08876, United States

Funder

Ministry of Science and Technology, Taiwan

Air Liquid Advanced Materials

Publisher

American Chemical Society (ACS)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.acs.org/doi/pdf/10.1021/acsomega.8b03103

Reference19 articles.

1. Mitsubishi Materials Corporatio. Investigative Report by the Accident Investigation Committee for the Explosion & Fire Accident occurred in the High-Purity Polycrystalline Silicon Manufacturing Facility at Yokkaichi Plant of Mitsubishi Materials Corporation. http://www.mmc.co.jp/corporate/en/news/2014/news20140612.html (accessed June 12, 2014).

2. Recent progress in silicone chemistry. I. Hydrolysis of reactive silane intermediates

3. Hazards of dichlorosilane exhaust deposits from the high-temperature oxide process as determined by FT-ICR mass spectrometry

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