Hydrogen-Induced Chemical Erosion of a-C:H Thin Films: Product Distribution and Temperature Dependence-Reference-Cited by-同舟云学术

Hydrogen-Induced Chemical Erosion of a-C:H Thin Films: Product Distribution and Temperature Dependence

Published:2001-06-09 Issue:26 Volume:105 Page:6194-6201
ISSN:1520-6106
Container-title:The Journal of Physical Chemistry B
language:en
Short-container-title:J. Phys. Chem. B

Author:

Zecho Thomas¹,Brandner Birgit D.¹,Biener Jürgen¹,Küppers Jürgen¹

Affiliation:

1. Experimentalphysik III, Universität Bayreuth, 95440 Bayreuth, Germany, and Max-Planck-Institut für Plasmaphysik (EURATOM Association), 85748 Garching, Germany

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Surfaces, Coatings and Films,Physical and Theoretical Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/jp010013e

Reference38 articles.

1. Plasma-deposited diamondlike carbon and related materials

2. Wall conditioning of fusion devices by reactive plasmas

3. Empirical categorization and naming of “diamond-like” carbon films

4. Amorphous carbon

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