1. The State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3. School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China
4. High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
5. College of Information Science and Engineering, Jiaxing University, Jiaxing 314001, China
6. Collaborative Research Center, Meisei University, Hino, Tokyo 191-8506, Japan
7. The State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi’an 710071, China