Addition of Surfactant Tween 80 in Coating Solutions for Making Mesoporous Pure Silica Zeolite MFI Low-k Films
Author:
Affiliation:
1. Department of Chemical Engineering, National Taiwan University, Taipei 106, Taiwan
Publisher
American Chemical Society (ACS)
Subject
Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ie100203e
Reference25 articles.
1. The International Technology Roadmap for Semiconductors; seehttp://www.itrs.net/Links/2008ITRS/Home2008.htm, 2008.
2. Continuous Mesoporous Silica Films with Highly Ordered Large Pore Structures
3. Low Dielectric Constant Mesoporous Silica Films Through Molecularly Templated Synthesis
4. Spin-on Mesoporous Silica Films with Ultralow Dielectric Constants, Ordered Pore Structures, and Hydrophobic Surfaces
5. Structural Characterization of Mesoporous Organosilica Films for Ultralow-k Dielectrics
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