Structural and Dielectric Properties of Subnanometric Laminates of Binary Oxides-Reference-Cited by-同舟云学术

Structural and Dielectric Properties of Subnanometric Laminates of Binary Oxides

Published:2015-11-11 Issue:46 Volume:7 Page:25679-25684
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Kahouli Abdelkader¹,Lebedev Oleg¹,Ben Elbahri Marwa¹,Mercey Bernard¹,Prellier Wilfrid¹,Riedel Stefan²,Czernohorsky Malte²,Lallemand Florent³,Bunel Catherine³,Lüders Ulrike¹

Affiliation:

1. CRISMAT, UMR 6508, CNRS-ENSICAEN, Normandie Université, 6 Blvd Maréchal Juin, 14000 Caen Cedex, France

2. Center Nanoelectronic Technologies, Fraunhofer Institute for Photonic Microsystems, Königsbrücker Strasse 178, 01099 Dresden, Germany

3. IPDiA, 2 rue de la Girafe, 14000 Caen Cedex, France

Funder

Ministère de l'Économie, des Finances et de l'Industrie

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.5b06485

Reference29 articles.

1. Ultrahigh Capacitance Density for Multiple ALD-Grown MIM Capacitor Stacks in 3-D Silicon

2. Alternative dielectrics to silicon dioxide for memory and logic devices

3. High dielectric constant oxides

4. Change in the chemical state and thermal stability of HfO2 by the incorporation of Al2O3

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