GaPO4 Sensors for Gravimetric Monitoring during Atomic Layer Deposition at High Temperatures
Author:
Affiliation:
1. Energy Systems Division and Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439
Publisher
American Chemical Society (ACS)
Subject
Analytical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ac050349a
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1. Atomic level epitaxy of 3C-SiC by low pressure vapour deposition with alternating gas supply
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4. Study of atomic layer epitaxy of zinc oxide by in-situ quartz crystal microgravimetry
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