1. Institute of Microelectronics, School of Physical Science and Technology, Lanzhou University, 222 South Tianshui Road, Lanzhou 730000, China
2. College of Optical and Electronic Technology, China Jiliang University, 258 Xueyuan Street, Hangzhou 310018, China
3. Institute of Sensor Technology, Gansu Academy of Sciences, 229 South Dingxi Road, Lanzhou 730000, China