1. Institute of Microelectronics, School of Physical Science and Technology, Lanzhou University, 222 South Tianshui Road, Lanzhou 730000, China
2. School of Microelectronics, Northwestern Polytechnical University, Xi’an 710072, China
3. Institute of Flexible Electronics, Northwestern Polytechnical University, Xi’an 710072, China
4. Yangtze River Delta Research Institute of NPU, Northwestern Polytechnical University, Taicang 215400, China
5. College of Optical and Electronic Technology, China Jiliang University, 258 Xueyuan Street, Hangzhou 310018, China
6. Institute of Sensor Technology, Gansu Academy of Sciences, 229 South Dingxi Road, Lanzhou 730000, China