1. SK Hynix, 2091 Gyeongchung-daero, Icheon 17336, Republic of Korea
2. Department of Materials Science and Engineering, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro-ku, Tokyo 152-8552, Japan
3. PLS-II Beamline Division, Pohang Accelerator Laboratory, 80 127Beon-gil, Jigok-ro, Pohang 37673, Republic of Korea
4. Surface Technology Institute, Ceko Corporation, 519 Dunchon-daero, Jungwon-gu, Seongnam 13216, Republic of Korea