Angular Distribution of Molecules Sputtered by Gas Cluster Ion Beams and Implications for Secondary Neutral Mass Spectrometry
Author:
Affiliation:
1. National Physical Laboratory, Hampton Road, Teddington TW11 0LW, United Kingdom
2. Kratos Analytical Ltd., Trafford Wharf Rd., Manchester M17 1GP, United Kingdom
Funder
Department for Business, Innovation and Skills
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.6b06821
Reference65 articles.
1. Developments in molecular SIMS depth profiling and 3D imaging of biological systems using polyatomic primary ions
2. Universal Equation for Argon Cluster Size-Dependence of Secondary Ion Spectra in SIMS of Organic Materials
3. The matrix effect in organic secondary ion mass spectrometry
4. SIMS of organics—Advances in 2D and 3D imaging and future outlook
5. Sputtering of Surfaces by Positive Ion Beams of Low Energy
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