1. Center
for Microtechnologies (ZfM), Chemnitz University of Technology, 09111 Chemnitz, Germany
2. Center for Advancing
Electronics Dresden (cfaed), 01187 Dresden, Germany
3. Department
of Physical Chemistry, Dresden University of Technology, 01062 Dresden, Germany
4. Kurt-Schwabe-Institut
für Mess- und Sensortechnik e.V. Meinsberg, 04736 Waldheim, Germany
5. Fraunhofer Institute
for Electronic Nano Systems, 01926 Chemnitz, Germany