Kinetics and Mechanism of Pyrolysis of Methyltrichlorosilane
Author:
Affiliation:
1. Department of Chemistry, College of Sciences, Shiraz University, Shiraz, I. R. Iran
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp0306592
Reference23 articles.
1. Numerical simulation of silicon carbide chemical vapor deposition
2. Primary processes in the low-pressure pyrolysis of methylsilane
3. Formation of carbon-excess SiC from pyrolysis of CH3SiCl3
4. Kinetics and mechanism of pyrolysis of some methylchlorosilanes
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