Kinetics and mechanism of pyrolysis of some methylchlorosilanes
Author:
Publisher
American Chemical Society (ACS)
Subject
Inorganic Chemistry,Organic Chemistry,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/om00148a012
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1. Flash pyrolysis mechanism of trimethylchlorosilane;International Journal of Mass Spectrometry;2022-12
2. Detailed kinetics of methylphenyldichlorosilane synthesis from methyldichlorosilane and chlorobenzene by gas phase condensation;Chinese Journal of Chemical Engineering;2015-06
3. Initial decomposition of methyltrichlorosilane in the chemical vapor deposition of silicon-carbide;Computational and Theoretical Chemistry;2011-08
4. Dissociation dynamics of chloromethyltrimethylsilane at 193nm;Chemical Physics Letters;2007-04
5. Kinetics and Mechanism of Pyrolysis of Methyltrichlorosilane;The Journal of Physical Chemistry A;2004-02-24
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