Direct Writing of Cobalt Silicide Nanostructures Using Single-Source Precursors
Author:
Affiliation:
1. Physikalisches Institut, Goethe Universität Frankfurt, 60438 Frankfurt am Main, Germany
Funder
Deutsche Forschungsgemeinschaft
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.1c14117
Reference44 articles.
1. Gas-assisted focused electron beam and ion beam processing and fabrication
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4. Focused Ion Beam vs Focused Electron Beam Deposition of Cobalt Silicide Nanostructures Using Single-Source Precursors: Implications for Nanoelectronic Gates, Interconnects, and Spintronics;ACS Applied Nano Materials;2022-09-21
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