Atomic Layer Deposition on Polymer Thin Films: On the Role of Precursor Infiltration and Reactivity-Reference-Cited by-同舟云学术

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Atomic Layer Deposition on Polymer Thin Films: On the Role of Precursor Infiltration and Reactivity

Published:2021-09-14 Issue:38 Volume:13 Page:46151-46163
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Petit Robin R.¹²³^ORCID,Li Jin²^ORCID,Van de Voorde Babs⁴^ORCID,Van Vlierberghe Sandra⁴^ORCID,Smet Philippe F.¹^ORCID,Detavernier Christophe²^ORCID

Affiliation:

1. Department of Solid State Sciences, LumiLab, Ghent University, Krijgslaan 281 S1, 9000 Gent, Belgium

2. Department of Solid State Sciences, CoCooN, Ghent University, Krijgslaan 281 S1, 9000 Gent, Belgium

3. SIM vzw, Technologiepark 48, 9052 Zwijnaarde, Belgium

4. Department of Organic and Macromolecular Chemistry, PBM, CMaC, Ghent University, Krijgslaan 281 S4-Bis, 9000 Gent, Belgium

Funder

Universiteit Gent

SIM-Flanders

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.1c12933

Reference57 articles.

1. Polymers in conventional and alternative lithography for the fabrication of nanostructures

2. Mechanistic understanding of tungsten oxide in-plane nanostructure growth via sequential infiltration synthesis

3. Polymers and food packaging

4. Recent advances in polymeric drug delivery systems

5. Flexible quantum dot light-emitting diodes for next-generation displays

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1. Revealing the Chemical Interactions between PMMA and TMA for Insights into Sequential Infiltration Synthesis;Macromolecules;2024-09-09

2. Tuning the Permeation Properties of Poly(1‐trimethylsilyl‐1‐propyne) by Vapor Phase Infiltration Using Trimethylaluminum;Advanced Materials Interfaces;2024-08-13

3. Sequential Infiltration Synthesis of Al₂O₃ in PMMA Thin Films: Temperature Investigation by Operando Spectroscopic Ellipsometry;ACS Applied Materials & Interfaces;2024-06-28

4. Ultrathin Al₂O₃ film modification on waterborne epoxy coatings by atomic layer deposition for augmenting the corrosion resistance;Nanotechnology;2024-05-17

5. Activation of polyimide by oxygen plasma for atomic layer deposition of highly compact titanium oxide coating;Nanotechnology;2024-04-09

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