Tailoring Silica Nanotribology for CMP Slurry Optimization: Ca2+ Cation Competition in C12TAB Mediated Lubrication-Reference-Cited by-同舟云学术

Tailoring Silica Nanotribology for CMP Slurry Optimization: Ca2+ Cation Competition in C12TAB Mediated Lubrication

Published:2010-04-12 Issue:4 Volume:2 Page:1228-1235
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Vakarelski Ivan U.¹,Brown Scott C.¹,Basim G. Bahar¹,Rabinovich Yakov I.¹,Moudgil Brij M.¹

Affiliation:

1. Particle Engineering Research Center and Department of Materials Science & Engineering, University of Florida, P.O. Box 116135, Gainesville, Florida 32611, Institute of Chemical and Engineering Sciences, 1 Pesek Road, Jurong Island, 627833, Singapore, and Department of Mechanical Engineering, Ozyegin University, Altunizade, Istanbul

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/am100070e

Reference47 articles.

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2. Surfactants in Personal Care Products and Decorative Cosmetics

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4. Counterion Effects on Adsorbed Micellar Shape: Experimental Study of the Role of Polarizability and Charge

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