Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films-Reference-Cited by-同舟云学术

Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films

Published:2011-05-10 Issue:11 Volume:23 Page:2901-2907
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Kariniemi Maarit¹,Niinistö Jaakko¹,Hatanpää Timo¹,Kemell Marianna¹,Sajavaara Timo²,Ritala Mikko¹,Leskelä Markku¹

Affiliation:

1. Laboratory of Inorganic Chemistry, University of Helsinki, P.O. Box 55, FI-00014 University of Helsinki, Finland

2. Department of Physics, University of Jyväskylä, P.O. Box 35, FI-40014 University of Jyväskylä, Finland

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm200402j

Reference30 articles.

1. Ritala, M.; Niinistö, J.InChemical Vapour Deposition: Precursors, Processes and Applications;Royal Society of Chemistry:Cambridge, UK, 2008; pp158–206.

2. Atomic Layer Deposition: An Overview

3. Plasmonics: Merging Photonics and Electronics at Nanoscale Dimensions

4. Surface plasmon subwavelength optics

5. International Technology Roadmap for Semiconductors. [Online] 2009; http://www.itrs.net/Links/2009ITRS/Home2009.htm.

Cited by 110 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A combinatorial hollow cathode discharge/plasma polymerization system for silver containing plasma parylene coating;Surface and Coatings Technology;2024-02

2. Advances in photocatalytic ceramic coatings;Advanced Ceramic Coatings for Energy Applications;2024

3. Atomic Layer Deposition of Antibacterial Nanocoatings: A Review;Antibiotics;2023-11-24

4. Atomic layer deposition (ALD) of palladium: from processes to applications;Critical Reviews in Solid State and Materials Sciences;2023-11-15

5. High-Performance Hydroxide Exchange Membrane Fuel Cell Comprising an Atomic Layer-Deposited Silver Cathode;Nano Letters;2023-08-28