Complementary Characterization of Buried Nanolayers by Quantitative X-ray Fluorescence Spectrometry under Conventional and Grazing Incidence Conditions-Reference-Cited by-同舟云学术

Complementary Characterization of Buried Nanolayers by Quantitative X-ray Fluorescence Spectrometry under Conventional and Grazing Incidence Conditions

Published:2011-10-25 Issue:22 Volume:83 Page:8623-8628
ISSN:0003-2700
Container-title:Analytical Chemistry
language:en
Short-container-title:Anal. Chem.

Author:

Unterumsberger Rainer¹,Pollakowski Beatrix¹,Müller Matthias¹,Beckhoff Burkhard¹

Affiliation:

1. Physikalisch-Technische Bundesanstalt, Abbestrasse 2-12, 10587 Berlin, Germany

Publisher

American Chemical Society (ACS)

Subject

Analytical Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/ac202074s

Reference20 articles.

1. Thickness determination for Cu and Ni nanolayers: Comparison of completely reference-free fundamental parameter-based X-ray fluorescence analysis and X-ray reflectometry

2. Characterisation of High-k Containing Nanolayers by Reference-Free X-Ray Fluorescence Analysis with Synchrotron Radiation

3. High Depth Resolution Depth Profile Analysis of Ultra Thin High-κ Hf Based Films using MEIS Compared with XTEM, XRF, SE and XPS

4. Glancing-incidence x-ray fluorescence of layered materials

5. Reference-Free Total Reflection X-ray Fluorescence Analysis of Semiconductor Surfaces with Synchrotron Radiation

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Elemental analysis of hourly collected air filters with X-ray fluorescence under grazing incidence;Analytical Sciences;2023-12-25

2. In situ gas cell for the analysis of adsorption behaviour on surfaces using X-ray spectroscopy;Applied Surface Science;2023-01

3. Traceable Characterization of Nanomaterials by X-ray Spectrometry Using Calibrated Instrumentation;Nanomaterials;2022-06-30

4. Quantification of Element Mass Concentrations in Ambient Aerosols by Combination of Cascade Impactor Sampling and Mobile Total Reflection X-ray Fluorescence Spectroscopy;Atmosphere;2021-02-27

5. References;X‐Ray Fluorescence Spectroscopy for Laboratory Applications;2021-02-08