Thickness determination for Cu and Ni nanolayers: Comparison of completely reference-free fundamental parameter-based X-ray fluorescence analysis and X-ray reflectometry
Author:
Publisher
Elsevier BV
Subject
Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference22 articles.
1. High-Resolution X-Ray Scattering, from Thin Films to Lateral Nanostructures;Pietsch,2004
2. Realisation and metrological characterisation of thickness standards below 100 nm;Thomsen-Schmidt;Appl. Phys.,2004
3. Determination of the thickness of coatings by means of a new XRF spectrometer;Fiorini;X-ray Spectrom.,2002
4. Absolute mass thickness determination of thin samples by X-ray fluorescence analysis;Barrea;Nucl. Instrum. Methods,1998
5. Quantitative thickness determination using X-ray fluorescence: application to multiple layers;Nygård;X-ray Spectrom.,2004
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