Thickness determination for Cu and Ni nanolayers: Comparison of completely reference-free fundamental parameter-based X-ray fluorescence analysis and X-ray reflectometry-Reference-Cited by-同舟云学术

Thickness determination for Cu and Ni nanolayers: Comparison of completely reference-free fundamental parameter-based X-ray fluorescence analysis and X-ray reflectometry

Published:2005-04 Issue:4 Volume:60 Page:505-510
ISSN:0584-8547
Container-title:Spectrochimica Acta Part B: Atomic Spectroscopy
language:en
Short-container-title:Spectrochimica Acta Part B: Atomic Spectroscopy

Author:

Kolbe Michael,Beckhoff Burkhard,Krumrey Michael,Ulm Gerhard

Publisher

Elsevier BV

Subject

Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference22 articles.

1. High-Resolution X-Ray Scattering, from Thin Films to Lateral Nanostructures;Pietsch,2004

2. Realisation and metrological characterisation of thickness standards below 100 nm;Thomsen-Schmidt;Appl. Phys.,2004

3. Determination of the thickness of coatings by means of a new XRF spectrometer;Fiorini;X-ray Spectrom.,2002

4. Absolute mass thickness determination of thin samples by X-ray fluorescence analysis;Barrea;Nucl. Instrum. Methods,1998

5. Quantitative thickness determination using X-ray fluorescence: application to multiple layers;Nygård;X-ray Spectrom.,2004

Cited by 73 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Model-free measurement of lateral recess in gate-all-around transistors with micro hard-X-ray fluorescence;Journal of Micro/Nanopatterning, Materials, and Metrology;2023-08-02

2. Nondestructive Measurement by One-Port Surface Acoustic Wave Resonator for Accurate Evaluation of Film Thickness;ECS Journal of Solid State Science and Technology;2023-07-01

3. A novel and holistic approach for experimental x-ray fundamental parameter determination—the Ru L-shell;New Journal of Physics;2023-07-01

4. K- and L-shell theoretical fluorescence yields for the Fe isonuclear sequence;Radiation Physics and Chemistry;2023-02

5. Experimental determination of tantalum L-shell fluorescence yields and Coster–Kronig transition probabilities;Journal of Analytical Atomic Spectrometry;2023