Sorption of CO2 and a CO2 Compatible Salt into an Extreme Ultraviolet Photoresist Film on a SiO2 Substrate-Reference-Cited by-同舟云学术

Sorption of CO2 and a CO2 Compatible Salt into an Extreme Ultraviolet Photoresist Film on a SiO2 Substrate

Published:2009-07-01 Issue:29 Volume:113 Page:9687-9693
ISSN:1520-6106
Container-title:The Journal of Physical Chemistry B
language:en
Short-container-title:J. Phys. Chem. B

Author:

Zweber Amy E.¹,Wagner Mark¹,Carbonell Ruben G.¹

Affiliation:

1. Chemical and Biomolecular Engineering Department, North Carolina State University, Partners Building I, Suite 3500, Raleigh, North Carolina 27695, and Stonelake Research Services, 3571 Far West Blvd, PMB #148, Austin, Texas 78731

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Surfaces, Coatings and Films,Physical and Theoretical Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/jp900481j

Reference38 articles.

1. Wagner, M.; DeYoung, J.U.S. Patent Ser. No. 11/088171,March23, 2005.

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