A review of recent work in sub-nanometre displacement measurement using optical and X–ray interferometry
Author:
Affiliation:
1. Centre for Basic, Thermal and Length Metrology, National Physical Laboratory, Queens Road, Teddington TW11 0LW, UK
Publisher
The Royal Society
Subject
General Physics and Astronomy,General Engineering,General Mathematics
Link
https://royalsocietypublishing.org/doi/pdf/10.1098/rsta.2001.0976
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3. Basile G. (and 13 others) 2000 Combined optical and X-ray interferometry for high-precision dimensional metrology. Proc. R. Soc. Lond. A 456 701{729.
4. Basile G. Bergamin A. Cavagnero G. & Mana G. 1989 Italian Patent 22558/RCGA.
5. Basile G. Bergamin A. Cavagnero G. & Mana G. 1992 Phase modulation in high resolution optical interferometry. Metrologia 28 455{461.
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