Affiliation:
1. School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
Abstract
To solve the short working distance and small measurement range of an all-fibre interferometer, we proposed a Mach–Zehnder Fabry–Perot hybrid fibre-optic interferometry system based on sinusoidal phase modulation. In this paper, a low-finesse fibre interferometer with a larger linear operating range for displacement measurement is realised using a self-collimating probe and incorporating a Kalman filter-based phase demodulation algorithm. Through experimental comparisons, it is demonstrated that the interferometer proposed in this paper can effectively reduce the phase delay, compensate for the depth of modulation drift, and correct the error due to parasitic interference introduced by the optical path structure through the algorithm. A linear large measurement working range of 20 cm is realised.
Funder
National Key R&D Program of China
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