Sputter-depth profiling for thin-film analysis
Author:
Affiliation:
1. Max Planck Institute for Metals Research, Heisenbergstrasse 3, 70569 Stuttgart, Germany ()
Publisher
The Royal Society
Subject
General Physics and Astronomy,General Engineering,General Mathematics
Link
https://royalsocietypublishing.org/doi/pdf/10.1098/rsta.2003.1304
Reference91 articles.
1. The depth resolution of sputter profiling
2. Microanalysis with ion microprobe mass analyzer;Andersen C. A.;Science,1970
3. ASTM 1992 Standard terminology relating to surface analysis. E-42 pp. 673-691c. Philadelphia PA: American Society for Testing and Materials.
4. Theoretical and experimental studies of the broadening of dilute delta-doped Si spikes in GaAs during SIMS depth profiling
5. Analysis of Submonolayers on Silver by Negative Secondary Ion Emission
Cited by 43 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Femtosecond laser ablation (fs-LA) XPS – A novel XPS depth profiling technique for thin films, coatings and multi-layered structures;Applied Surface Science;2024-05
2. Surface Chemical Analysis of Ceramics and Ceramic‐Enhanced Analytics;Surface‐Functionalized Ceramics;2022-12-16
3. Study on the surface modification of Ta2O5 bombarded by argon ions;Optical Materials Express;2022-11-07
4. Oxide layer delamination: An energy dissipation mechanism during high-velocity microparticle impacts;Applied Surface Science;2022-02
5. Surface analysis and depth profiling using time-of-flight elastic recoil detection analysis with argon sputtering;Scientific Reports;2018-07-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3