Influence of Annealing Temperature on Mechanical and Wetting Properties of β-FeSi2 Films Built Using Facing-Targets Direct-Current Sputtering-Reference-Cited by-同舟云学术

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Influence of Annealing Temperature on Mechanical and Wetting Properties of β-FeSi2 Films Built Using Facing-Targets Direct-Current Sputtering

Published:2020-01-01 Issue:1 Volume:20 Page:621-628
ISSN:1533-4880
Container-title:Journal of Nanoscience and Nanotechnology
language:en
Short-container-title:j nanosci nanotechnol

Author:

Charoenyuenyao Peerasil¹,Promros Nathaporn¹,Chaleawpong Rawiwan¹,Saekow Bunpot²,Porntheeraphat Supanit²,Yoshitake Tsuyoshi³

Affiliation:

1. Department of Physics, King Mongkut’s Institute of Technology Ladkrabang, Ladkrabang, Bangkok 10520, Thailand

2. Photonics Technology Laboratory, National Electronics and Computer Technology Center, Pathumthani 12120, Thailand

3. Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan

Publisher

American Scientific Publishers

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Wetting state and mechanical property alteration for the Fe3Si films using rapid thermal annealing under various temperatures;Heliyon;2023-12

2. Impact of Rapid Thermal Annealing Under Various Temperatures on the Wetting and Mechanical Traits of Fe3si Films;2023

3. Investigation of morphological surface features, wetting behavior and mechanical traits under various substrate temperatures for beta iron disilicide prepared via facing-targets sputtering;Materials Science in Semiconductor Processing;2022-08

4. Photovoltaic, capacitance-voltage, conductance-voltage, and electrical impedance characteristics of p-type silicon/intrinsic-silicon/n-type semiconducting iron disilicide heterostructures built via facing target direct-current sputtering;Thin Solid Films;2020-09

5. Impact of annealing temperature and carbon doping on the wetting and surface morphology of semiconducting iron disilicide formed via radio frequency magnetron sputtering;Thin Solid Films;2020-09

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