Deposition of Molybdenum Thin Films on Flexible Polymer Substrates by Radio Frequency Magnetron Sputtering-Reference-Cited by-同舟云学术

Deposition of Molybdenum Thin Films on Flexible Polymer Substrates by Radio Frequency Magnetron Sputtering

Published:2016-08-01 Issue:8 Volume:16 Page:8154-8159
ISSN:1533-4880
Container-title:Journal of Nanoscience and Nanotechnology
language:en
Short-container-title:j nanosci nanotechnol

Author:

Zhang Rui¹,Huo Zhenxuan¹,Jiao Xiangquan¹,JieYang .²,Du Bo³,Zhong Hui¹,Shi Yu¹

Affiliation:

1. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China

2. China Academy of Engineering Physics, Mian Shan Road 64, Mian Yang 621900, China

3. 26th Institute of China Electronics Technology Group Corporation, Huayuan Road 14, Nan An District, Chongqing 40060, China

Publisher

American Scientific Publishers

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering

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