Influence of the Li and M (M = V, Nb, Ta, or Zr) Composition Ratio on the Piezoelectric Properties of LiM-doped AlN Films
Author:
Affiliation:
1. Materials Research Center, Technology & Intellectual Property HQ, TDK Corporation,
Publisher
The Society of Materials Engineering for Resources of Japan
Subject
Mechanical Engineering,General Materials Science,General Chemical Engineering
Link
https://www.jstage.jst.go.jp/article/ijsmer/25/1/25_115/_pdf
Reference29 articles.
1. [1] Dubois M.-A.; Muralt P., “Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications” Appl. Phys. Lett. 74, 3032-3034 (1999).
2. [2] Loebl H.P.; Klee M.; Metzmacher C.; Brand W.; Milsom R.; Lok P., “Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators” Mater. Chem. Phys. 79, 143-146 (2003).
3. [3] Shelton S.; Chan M.-L.; Park H.; Horsley D.; Boser B.; Izyumin I.; Przybyla R.; Frey T.; Judy M.; Nunan K.; Sammoura F.; Yang K., “CMOS-Compatible AlN Piezoelectric Micromachined Ultrasonic Transducers” 2009 IEEE International Ultrasonics Symposium Proceedings 402- 405 (2009).
4. [4] Przybyla R.; Shelton S.; Guedes A.; Izyumin I.; Kline M.; Horsley D.; Boser B., “In-Air Rangefinding With an AlN Piezoelectric Micromachined Ultrasound Transducer” IEEE Sensors Journal 11, 2690-2697 (2011).
5. [5] Renaud M.; Karakaya K.; Sterken T.; Fiorini P.; Van Hoof C.; Puers R., “Fabrication, modelling and characterization of MEMS piezoelectric vibration harvesters” Sens. Actuator A Phys. 145, 380-386 (2008).
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1. Development of Piezoelectric MEMS Ultrasonic Sensors and Piezoelectric Thin Film Materials;The Journal of The Institute of Electrical Engineers of Japan;2024-02-01
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