Development of Piezoelectric MEMS Ultrasonic Sensors and Piezoelectric Thin Film Materials
Author:
Affiliation:
1. TDK（株）
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Link
https://www.jstage.jst.go.jp/article/ieejjournal/144/2/144_68/_pdf
Reference14 articles.
1. (1) S. Trolier-Mckinstry and P. Muralt : “Thin Film Piezoelectrics for MEMS”, J. Electroceram., Vol.12, No.7, pp.7-17 (2004)
2. (2) D. A. Horsley, R. J. Przybyla, S. E. Shelton, F. T. Goericke, B. E. Eovino, M. Alex, and J. Logan : "Piezoelectric Micromachined Ultrasonic Transducers for Range-Finding Applications", 2021 5 th IEEE Electron Devices Technology &
3. Manufacturing Conference (EDTM), pp.1-3 (2021)
4. (3) R. J. Przybyla, S. E. Shelton, C. Lee, B. E. Eovino, Q. Chau, M. H. Kline, O. I. Izyumin, and D. A. Horsley : “Mass Produced Micromachined Ultrasonic Time-Of-Flight Sensors Operating in Different Frequency Bands”, 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), pp.961-964 (2023)
5. (4) TDK Chirp Microsystems : “DS-000331-CH101-Datasheet”, (2020)
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