Mass Produced Micromachined Ultrasonic Time-Of-Flight Sensors Operating in Different Frequency Bands

Author:

Przybyla Richard J.1,Shelton Stefon E.1,Lee Cathy1,Eovino Benjamin E.1,Chau Quy1,Kline Mitchell H.1,Izyumin Oleg I.1,Horsley David A.1

Affiliation:

1. TDK InvenSense,Berkeley,USA

Publisher

IEEE

Reference10 articles.

1. Long Range Ultrasonic Time-of-Flight Range Sensor;ICU-20201 datasheet,2022

2. Ultrasonic 3D Rangefinder on a Chip;przybyla;Ph D Dissertation,2013

3. 3D Ultrasonic Rangefinder on a Chip

4. Piezoelectric micromachined ultrasonic transducers in consumer electronics: The next little thing?

5. In-Air Rangefinding With an AlN Piezoelectric Micromachined Ultrasound Transducer

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