Author:
Tong B. Y.,Wong S. K.,Yao J.,Lau W. N.,Du N.,John P. K.
Abstract
AbstractWhen silane, with more than 0.1% of diborane in the gas mixture, are co-pyrolyzed at temperatures below 540°C, an amorphous silicon-boron alloy is formed. The composition of the solid film was determined by SINS and Auger spectroscopy. The amorphous nature of the films was established by X-ray diffraction, laser Raman spectroscopy, and TEM electron diffraction. Electrical and optical properties of this material are reported. Oxidation and chemical etching of this material were also studied.
Publisher
Springer Science and Business Media LLC
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