High Deposition Rate Amorphous Silicon Alloy Xerographic Photoreceptor

Author:

Hudgens S.J.,Johncock A.G.

Abstract

AbstractA new multilayer amorphous silicon alloy photoreceptor has been deposited at rates exceeding 36 µm/hr. using 2.45 GHz microwave glow discharge. The device whose structure is Al/a-Si:H:F (B-300)/a-Si:H:F (B-10)/a-Si:H:F:C is deposited in a powderless plasma deposition process which exhibits gas utilization efficiency approaching 100%. The xerographic performance of a 28µm device is: Vsat∼1100 V for a +7 KV corona; dark half decay time ≃5 sec; and photosensitivity ∼0.3 µJ/cm2 at λ = 650 nm. Stable, high quality xerographic images are obtained with these photoreceptors.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference16 articles.

1. 14. Fournier G. and Bjornard E. , unpublished report.

2. 13.These concepts are most recently discussed in Stanford R. Ovshinsky, Proc. Int'l Ion Engineering Congress, Kyoto 1983, 817.

3. 12.This deposition technology and materials are protected an issued U.S. Patent, Ovshinsky et al. number 4,504,518.

4. Plasma polymerization and deposition of amorphous hydrogenated silicon from rf and dc silane plasmas

5. Fundamental mechanisms in silane plasma decompositions and amorphous silicon deposition

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