Defect Properties of Cathode Deposited Glow Discharge Amorphous Silicon Germanium Alloys

Abstract

ABSTRACTWe have characterized the deep defect densities and their energy distributions for a series of a-Si1-xGex:H alloys with large Ge content (0.57< × < 1.00) prepared by the cathode deposited glow discharge method. Our results indicate markedly superior properties for these samples. A small Urbach tail slope (about 45meV) was found for all samples in this alloy range. The defect densities were either obtained directly from the drive-level capacitance profiling or deduced from the sub-band-gap optical spectra. Both are substantially lower than the trend line determined from previous studies of a-Si1-xGex:H samples produced by conventional glow discharge and by Photo-CVD methods. However, the relation between the total defect densities and the optical spectra in the cathodic samples obeys the same defect formation model that has been used to successfully predict the defect densities in other types of a-Si1-xGex:H material.