Structural Characterization of InAs/(GaIn)Sb Superlattices for IR Optoelectronics-Reference-Cited by-同舟云学术

Structural Characterization of InAs/(GaIn)Sb Superlattices for IR Optoelectronics

Published:1996 Issue: Volume:421 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Wagner J.,Schmitz J.,Fuchs F.,Weimar U.,Herres N.,Tränkle G.,Koidl P.

Abstract

AbstractWe report on the structural characterization of InAs/(GaIn)Sb superlattices (SL) grown by solid-source molecular-beam epitaxy. SL periodicity and overall structural quality were assessed by high-resolution X-ray diffraction and Raman spectroscopy. Spectroscopic ellipsometry was found to be sensitive to the (GaIn)Sb alloy composition.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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