Hydrogen Bonding in a-Si:H Prepared by Remote Hydrogen Plasma Deposition

Abstract

ABSTRACTNuclear magnetic resonance (NMR) has provided essential information on the local atomic bonding and microstructure of hydrogen in hydrogenated amorphous silicon (a-Si:H). Here we describe results from NMR and Raman spectroscopy on the hydrogen distribution and bonding in a-Si:H prepared by remote hydrogen plasma (RHP) deposition and contrast the results with those from a-Si:H prepared by conventional glow discharge (GD) deposition. The films prepared by the two techniques have similar H bonding except for the presence in the RHP sample of about 1 atomic % molecular hydrogen, a factor of ten higher than in GD material. For RHP samples prepared from a deuterium plasma rather than a hydrogen plasma, substantial differences in the hydrogen NMR spectra, hydrogen spin lattice relaxation time and Raman spectra are observed. The hydrogen which necessarily originates from the silane has a dramatically altered spectra.