Author:
Colon Jose E.,Elsaesser David W.,Yeo Yung Kee,Hengehold Robert L.,Pomrenke Gernot S.
Abstract
ABSTRACTA systematic photoluminescence study of erbium and oxygen co-implantation into GaAs and AlxGal1−xAs with × = 0.1, 0.2, 0.3, and 0.4 was carried out. The addition of oxygen greatly enhanced the Er emission intensity from AlxGal1−xAs:Er while the O and Er co-doping into GaAs rather made the Er emission intensity decrease from that of the GaAs:Er. The Er emission intensity from AlxGal1−xAs:(Er+O) generally increases with increasing Al mole fraction and O dose up to 1 × 10 15/cm2, but it does not depend much on the substrate conductivity.
Publisher
Springer Science and Business Media LLC
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