Author:
Bauerle D.,Eyett M.,Kolzer U.,Kullmer R.,Mogyorosi P.,Piglmayer K.
Abstract
ABSTRACTLaser-induced surface reduction and ablation of piezoelectric oxides is described for the examples of BaTi03 and LiNb03.The microscopic mechanisms involved in the laser-induced etching of single-crystal (100) Si in Cl2 atmosphere are investigated for the regime of low laser powers.
Publisher
Springer Science and Business Media LLC
Cited by
3 articles.
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