Excimer laser ablation of inorganic materials
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference9 articles.
1. Laser-Induced Surface Modification and Etching of Materials
2. Chemical processing with lasers: Recent developments
3. Comparison of CW and Pulsed UV Laser Etching of LiNbO3
4. Excimer laser projection etching of GaAs
5. Excimer-laser etching of diamond and hard carbon films by direct writing and optical projection
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1. UV-written grating couplers on thin-film lithium niobate ridge waveguides;Optics Express;2020-09-08
2. ArF Excimer Laser Micromachining of MEMS Materials: Characterization and Applications;Journal of Micro and Nano-Manufacturing;2014-04-11
3. Role of target conditioning on the thermo-optical response of bismuth nanostructures produced by pulsed laser deposition;Applied Physics A;2012-08-23
4. KrF excimer laser trenching of X-cut LiNbO3 for realization of optimized optical modulator electrode structures;Journal of Micro/Nanolithography, MEMS, and MOEMS;2002-07-01
5. In situ diagnosis of pulsed UV laser surface ablation of tungsten carbide hardmetal by using laser-induced optical emission spectroscopy;Applied Surface Science;2001-12
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