KrF excimer laser trenching of <bold>X</bold>-cut <inline-formula><math display="inline" overflow="scroll"><msub><mi>LiNbO</mi><mrow><mn>3</mn></mrow></msub></math></inline-formula> for realization of optimized optical modulator electrode structures-Reference-Cited by-同舟云学术

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KrF excimer laser trenching of X-cut ${LiNbO}_{3}$ for realization of optimized optical modulator electrode structures

Published:2002-07-01 Issue:2 Volume:1 Page:117
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Chong Han-Woo

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Lithium niobate: Summary of physical properties and crystal structure

2. Microwave photonics: New direction between microwave and photonic technologies

3. O. Mitomi, K. Noguchi, and H. Miyazawa, “Ultra-broadband and low driving voltage LiNbO3 optical modulators for optical transmission systems,”Lasers and Electro-optics Society Annual Meeting Conference Proc.Vol. 1, pp. 116, 117, San Francisco, California (1995).

4. Design of ultra-broad-band LiNbO/sub 3/ optical modulators with ridge structure

5. Wet etching of proton-exchanged lithium niobate-a novel processing technique

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