Indium-Carbon Co-Implantation in GaAs

Abstract

ABSTRACTWe report on the formation of p+ layers in GaAs by the co-implantation of indium with carbon. Sheet hole concentrations of 2E14 cm−2 were achieved. The co-implant acts to create stoichiometric disturbances and to increase VAs concentration, allowing the C to occupy the vacant As lattice sites. The effect of In on the stoichiometry of the implanted layer was investigated. It was found that addition of 0.1–1% of a group III ion had the effect of shifting the effective As fraction toward the Ga-rich region, thus altering the crystal stoichiometry.