Mechanisms and Kinetics of Iion Beam-Induced Compositional Modifications

Abstract

ABSTRACTNear-surface compositional modification of ion-bombarded alloys results from the dynamic interplay of several atomistic processes. In addition to displacement mixing leading to t randomization of atomic locations, which is dominant at relatively low temperatures, and preferential loss of alloying elements by sputtering, many thermally-activated processes, including radiation-enhanced diffusion, radiation-induced segregation and Gibbsian adsorption, also play important roles. The relative contributions of these processes to the evolution of the target composition profile depends on the target materials and irradiation variables. Although a good understanding of the individual processes has been achieved, information regarding their synergistic effects on alloy surface modification is still limited. In the present article, these processes will be characterized in simple physical terms, and the present understanding of their relative significance and contributions in changing the target composition during ion bombardment will be discussed in view of recent progress in theoretical modeling and experimental study.