Author:
Smith David A.,Ibrahim A.
Abstract
ABSTRACTThe Microstructure of films is a result of the interplay of nucleation and growth processes which occur during deposition. A columnar structure is characteristic of films irrespective of the material or the deposition process. The length scale of the microstructure depends systematically on the atomic mobility during growth.
Publisher
Springer Science and Business Media LLC
Cited by
13 articles.
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