Self Bias of an R.F. Driven Probe in an R.F. Plasma

Abstract

AbstractAn effect of sinusoidal r.f. voltages between a plasma and a floating Langmuir probe (or other electrode) is to produce a d.c. self bias voltage. This effect has previously been studied with r.f. applied to probes in d.c. plasmas, and the results have often been referred to in connection with d.c. probes in r.f. plasmas, although the situation is slightly different. In the current work a ‘d.c.’ probe in an r.f. plasma is examined. However, the r.f. potential difference between probe and plasma is first compensated for by superimposing a synchronous signal of appropriate amplitude and phase on to the d.c. circuit. Thus the probe can perform essentially d.c. type measurements on the r.f. plasma. The deliberate reintroduction of a measure of r.f. between probe and plasma is accomplished by overdriving the compensation signal thereby generating a controlled amount of self bias.The observed variation of probe bias with r.f. overdrive is in good agreement with analytic theory based upon modified Bessel functions as used for d.c. generated plasmas. This work is of general interest in probe diagnostics of r.f. generated plasmas, and understanding the self bias of isolated electrodes.