Automated Control of an Actively Compensated Langmuir Probe System Using Simulated Annealing

Author:

Nolle L.,Goodyear A.,Hopgood A. A.,Picton P. D.,Braithwaite N. St. J.

Publisher

Springer London

Reference8 articles.

1. Swift J D S, Schwar M J R: Electrical Probes for Plasma Diagnostics, Ilitte, London, 1970

2. Benjamin N M P, Braithwaite N St J, Allen J E: Self bias of an rJ. Driven probe in an r. f. plasma, Mat. Res. Sco. Symp. Proc. 117, 1988, pp 275–280

3. Dyson A, Bryant P, Allen J E: Multiple harmonic compensation of Langmuir probes in rf discharges, Meas. Sci. Techno!. 11(2000), pp 554–559

4. Sobolewski M A: Electrical Characterization of Radio Frequency Discharges in the Gaseous Electronics Conference Reference Cell, Journal of VacuumScience & Technology A - Vacuum Surfaces and Films, 10:(6) 3550–3562

5. Nolle L, Walters M, Annstrong D A, Ware J A: Optimum Finisher Mill Setup in the Hot Rolling of Wide Steel Strip Using Simulated Annealing, Proceedings. of the 5th International Mendel Conference, Brno, 1999, pp 100–105

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