Compound formation and kinetics in Al–Pd2Si reactions

Author:

Liu Joyce C.,Mayer J. W.

Abstract

Lateral diffusion couples containing Al islands on Pd–Si multiple layers are used to study Al–Pd2Si reactions. The Pd2Si phase was first formed in the Pd–Si multiple-layer region after furnace annealing at 225 °C. Then, the Al–Pd2Si lateral couples were in situ annealed in a transmission electron microscope at temperatures ranging from 377–438 °C. The laterally growing region is composed of the Al3Pd2 compound and Si precipitates, as identified by selected area diffraction (SAD). During the in situ anneals, transmission electron microscopy (TEM) images were recorded by a video cassette recorder allowing thereafter a kinetic study. The lateral growth is parabolically dependent on the annealing time. An activation energy of 1.7 eV is found for this diffusion process.

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Mass and energy dispersive elastic recoil detection studies of low temperature Si/Pd/GaAs and Si/Pd/AlxGa(1 − x)As interfacial reactions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1998-03

2. Interactions of Cu with CoSi2, CrSi2and TiSi2with and without TiNxbarrier layers;Journal of Applied Physics;1990-12-15

3. Interaction of Cu with CoSi2with and without TiNxbarrier layers;Applied Physics Letters;1990-09-24

4. Aluminum and Ni–silicide lateral reactions;Journal of Materials Research;1990-02

5. Thermal stability of the Cu/Pd/Si metallurgy;Applied Physics Letters;1989-10-09

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