Atomic layer deposition of zirconium oxide thin films-Reference-Cited by-同舟云学术

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Atomic layer deposition of zirconium oxide thin films

Published:2019-11-08 Issue:7 Volume:35 Page:804-812
ISSN:0884-2914
Container-title:Journal of Materials Research
language:en
Short-container-title:J. Mater. Res.

Author:

Wang Xin,Ghosh Sujan Kumar,Afshar-Mohajer Mahyar,Zhou Hua,Liu Yongqiang,Han Xiaoxiao,Cai Jiyu,Zou Min,Meng Xiangbo

Abstract

Abstract

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference39 articles.

1. Controlled synthesis of Zirconium Oxide on graphene nanosheets by atomic layer deposition and its growth mechanism

2. Atomic layer deposition of zirconium oxide from zirconium tetraiodide, water and hydrogen peroxide

3. Structural and electrical characterization of ALCVD ZrO2 thin films on silicon

4. Low-Temperature Deposition of Zirconium Oxide-Based Nanocrystalline Films by Alternate Supply of Zr[OC(CH3)3]4 and H2O

5. Electrical properties of ZrO2 thin films

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