Chemisorption of tetrakis(dimethylamino)zirconium on zirconium oxide: Density functional theory study
Author:
Funder
NRF
KBSI
Publisher
Elsevier BV
Reference42 articles.
1. Atomic layer chemical vapor deposition (ALCVD) of Hf and Zr silicate and aluminate high-k gate dielectric for next generation nano devices;Im;J. Chem. Eng. Japan,2005
2. ALD zirconium oxide (ZrO2) thin films mechanical/structural properties for high-tech applications;Mamun;ECS J. Solid State Sci. Technol.,2015
3. Chemical vapor deposited monolayer MoS2 top-gate MOSFET with atomic-layer-deposited ZrO2 as gate dielectric;Hu;Semicond. Sci. Technol.,2018
4. High dielectric constant ZrO2 films by atomic layer deposition technique on germanium substrates;Anil;Silicon,2015
5. A viable route to enhance permittivity of gate dielectrics on In0.53Ga0.47As(001): trimethylaluminum-based atomic layer deposition of MeO2 (Me = Zr, Hf);Molle;ECS J. Solid State Sci. Technol.,2013
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3