Surface Analysis Of Lcd Materials iN Various Stages of Production by Time-of-Flight Secondary Ion Mass Spectroscopy (TOF-SIMS)

Abstract

Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is a surface analysis technique which provides a sensitive characterization of the elemental and molecular composition of the near-surface region (top few monolayers) of solid materials1. This mass spectrometry technique can also localize the distribution of specific elements, molecules or molecular fragments at submicrometer (µm) lateral resolutions.2