Three-dimensional hybrid bonding integration challenges and solutions toward multi-wafer stacking

Author:

Arnaud L.,Karam C.,Bresson N.,Dubarry C.,Borel S.,Assous M.,Mauguen G.,Fournel F.,Gottardi M.,Mourier T.,Cheramy S.,Servant F.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science

Reference20 articles.

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2. D. Thomas, J. Michailos, K. Rochereau: “Challenges and capabilities of 3D integration in CMOS imaging sensors,” ESSDERC 2019 - 49th European Solid-State Device Research Conference (ESSDERC), Cracow, Poland, 2019; pp. 54–56.

3. P. Vivet, G. Sicard, L. Millet, S. Chevobbe, K. Ben Chehida, L.A. Cubero, M. Alegre, M. Bouvier, A. Valentian, M. Lepecq, T. Dombek, O. Bichler, S. Thuriès, D. Lattard, S. Cheramy, P. Batude, and F. Clermid: Advanced 3D technologies and architecture for 3D image sensors. In Proceedings of the 2019 Design, Automation and Test in Europe Conference and Exhibition (IEEE, Florence, Italy, 2019), pp. 674–679.

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5. J. Jourdon, S. Lhostis, S. Moreau, J. Chossat, M. Arnoux, C. Sart, Y. Henrion, P. Lamontagne, L. Arnaud, N. Bresson, V. Balan, C. Euvrard, D. Scevola, E. Deloffre, S. Mermoz, A. Martin, H. Bilgen, F. Andre, C. Charles, D. Bouchu, A. Farcy, S. Guillaumet, A. Jouve, H. Fremont, and S. Cheramy: Hybrid bonding for 3D stacked image sensor: impact of pitch shrinkage on interconnect robustness. In Proceedings of 2018 IEEE International Electron Devices Meeting (IEEE, San Francisco, CA, USA, 2018), pp. 157–160.

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