Author:
Maniguet L,Ignat M.,Dupeux M.,Bacmann J.J.,Normandon Ph.
Abstract
AbstractThe determination by X-ray diffraction of the elastic strain tensors and the corresponding stress tensors in uniform films and patterned lines of tungsten was used to investigate the effect of line width. The stresses were found to increase with increasing line width. These experimental results are discussed with respect to the values obtained from a model using a distributed force in the line. The results of the calculations are in agreement with the X-ray measurements. The edge effects appear to be significant for tungsten lines.
Publisher
Springer Science and Business Media LLC
Reference8 articles.
1. Stress in Passivated Films;Flinn;Thin Films: Stress and Mechanical Propcna.II. MRS Symposium Proceedings,1990
2. X‐ray diffraction determination of the effect of various passivations on stress in metal films and patterned lines
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8 articles.
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